10/15/2010	8:30:02 AM	Recipe started at 8:30 AM
10/15/2010	8:30:02 AM	Helium valve closed
10/15/2010	8:30:02 AM	BCl3 valve closed
10/15/2010	8:30:02 AM	PH3 valve closed
10/15/2010	8:30:02 AM	SiCl4 pre valve closed
10/15/2010	8:30:02 AM	SiCl4 post valve closed
10/15/2010	8:30:02 AM	Main Vac valve closed
10/15/2010	8:30:02 AM	Bypass valve closed
10/15/2010	8:30:02 AM	Bubbler valve closed
10/15/2010	8:30:02 AM	H2 valve opened
10/15/2010	8:30:02 AM	Helium MFC set to  0.000000
10/15/2010	8:30:02 AM	H2 MFC set to  500.000000
10/15/2010	8:30:02 AM	BCl3 MFC set to  0.000000
10/15/2010	8:30:02 AM	PHl3 MFC set to  0.000000
10/15/2010	8:30:02 AM	SiCl4 MFC set to  0.000000
10/15/2010	8:30:02 AM	Bypass solenoid MFC set to  0.000000
10/15/2010	8:30:02 AM	Tube furnace set to 100
10/15/2010	8:31:25 AM	Helium valve closed
10/15/2010	8:31:25 AM	BCl3 valve closed
10/15/2010	8:31:25 AM	PH3 valve closed
10/15/2010	8:31:25 AM	SiCl4 pre valve closed
10/15/2010	8:31:25 AM	SiCl4 post valve closed
10/15/2010	8:31:25 AM	Main Vac valve closed
10/15/2010	8:31:25 AM	Bypass valve closed
10/15/2010	8:31:25 AM	H2 valve opened
10/15/2010	8:31:25 AM	Bubbler valve opened
10/15/2010	8:31:25 AM	Helium MFC set to  0.000000
10/15/2010	8:31:25 AM	H2 MFC set to  500.000000
10/15/2010	8:31:25 AM	BCl3 MFC set to  0.000000
10/15/2010	8:31:25 AM	PHl3 MFC set to  0.000000
10/15/2010	8:31:25 AM	SiCl4 MFC set to  0.000000
10/15/2010	8:31:25 AM	Bypass solenoid MFC set to  0.000000
10/15/2010	8:31:25 AM	Tube furnace set to 1000
10/15/2010	8:51:25 AM	Helium valve closed
10/15/2010	8:51:25 AM	PH3 valve closed
10/15/2010	8:51:25 AM	Main Vac valve closed
10/15/2010	8:51:25 AM	Bypass valve closed
10/15/2010	8:51:25 AM	H2 valve opened
10/15/2010	8:51:25 AM	BCl3 valve opened
10/15/2010	8:51:25 AM	SiCl4 pre valve opened
10/15/2010	8:51:25 AM	SiCl4 post valve opened
10/15/2010	8:51:25 AM	Bubbler valve opened
10/15/2010	8:51:25 AM	Helium MFC set to  0.000000
10/15/2010	8:51:25 AM	H2 MFC set to  500.000000
10/15/2010	8:51:25 AM	BCl3 MFC set to  10.000000
10/15/2010	8:51:25 AM	PHl3 MFC set to  0.000000
10/15/2010	8:51:25 AM	SiCl4 MFC set to  50.000000
10/15/2010	8:51:25 AM	Bypass solenoid MFC set to  0.000000
10/15/2010	8:51:25 AM	Tube furnace set to 1000
10/15/2010	9:03:25 AM	H2 valve closed
10/15/2010	9:03:25 AM	BCl3 valve closed
10/15/2010	9:03:25 AM	PH3 valve closed
10/15/2010	9:03:25 AM	SiCl4 pre valve closed
10/15/2010	9:03:25 AM	SiCl4 post valve closed
10/15/2010	9:03:25 AM	Main Vac valve closed
10/15/2010	9:03:25 AM	Bypass valve closed
10/15/2010	9:03:25 AM	Helium valve opened
10/15/2010	9:03:25 AM	Bubbler valve opened
10/15/2010	9:03:25 AM	Helium MFC set to  500.000000
10/15/2010	9:03:25 AM	H2 MFC set to  0.000000
10/15/2010	9:03:25 AM	BCl3 MFC set to  0.000000
10/15/2010	9:03:25 AM	PHl3 MFC set to  0.000000
10/15/2010	9:03:25 AM	SiCl4 MFC set to  0.000000
10/15/2010	9:03:25 AM	Bypass solenoid MFC set to  0.000000
10/15/2010	9:03:25 AM	Tube furnace set to 0
10/15/2010	9:23:25 AM	Helium valve closed
10/15/2010	9:23:25 AM	H2 valve closed
10/15/2010	9:23:25 AM	BCl3 valve closed
10/15/2010	9:23:25 AM	PH3 valve closed
10/15/2010	9:23:25 AM	SiCl4 pre valve closed
10/15/2010	9:23:25 AM	SiCl4 post valve closed
10/15/2010	9:23:25 AM	Main Vac valve closed
10/15/2010	9:23:25 AM	Bypass valve closed
10/15/2010	9:23:25 AM	Bubbler valve closed
10/15/2010	9:23:25 AM	Helium MFC set to  0.000000
10/15/2010	9:23:25 AM	H2 MFC set to  0.000000
10/15/2010	9:23:25 AM	BCl3 MFC set to  0.000000
10/15/2010	9:23:25 AM	PHl3 MFC set to  0.000000
10/15/2010	9:23:25 AM	SiCl4 MFC set to  0.000000
10/15/2010	9:23:25 AM	Bypass solenoid MFC set to  0.000000
10/15/2010	9:23:25 AM	Tube furnace set to 0
10/15/2010	9:23:25 AM	Run finished at 9:23 AM
10/15/2010	1:26:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/15/2010	1:26:55 PM	Recipe started at 1:26 PM
10/15/2010	1:26:55 PM	Helium valve closed
10/15/2010	1:26:55 PM	H2 valve closed
10/15/2010	1:26:55 PM	BCl3 valve closed
10/15/2010	1:26:55 PM	PH3 valve closed
10/15/2010	1:26:55 PM	SiCl4 pre valve closed
10/15/2010	1:26:55 PM	SiCl4 post valve closed
10/15/2010	1:26:55 PM	Main Vac valve closed
10/15/2010	1:26:55 PM	Bubbler valve closed
10/15/2010	1:26:55 PM	Bypass valve opened
10/15/2010	1:26:55 PM	Helium MFC set to  0.000000
10/15/2010	1:26:55 PM	H2 MFC set to  0.000000
10/15/2010	1:26:55 PM	BCl3 MFC set to  0.000000
10/15/2010	1:26:55 PM	PHl3 MFC set to  0.000000
10/15/2010	1:26:55 PM	SiCl4 MFC set to  0.000000
10/15/2010	1:26:55 PM	Bypass solenoid MFC set to  0.000000
10/15/2010	1:26:55 PM	Tube furnace set to 0
10/15/2010	1:27:45 PM	Helium valve closed
10/15/2010	1:27:45 PM	H2 valve closed
10/15/2010	1:27:45 PM	BCl3 valve closed
10/15/2010	1:27:45 PM	PH3 valve closed
10/15/2010	1:27:45 PM	SiCl4 pre valve closed
10/15/2010	1:27:45 PM	SiCl4 post valve closed
10/15/2010	1:27:45 PM	Bubbler valve closed
10/15/2010	1:27:45 PM	Main Vac valve opened
10/15/2010	1:27:45 PM	Bypass valve opened
10/15/2010	1:27:45 PM	Helium MFC set to  0.000000
10/15/2010	1:27:45 PM	H2 MFC set to  0.000000
10/15/2010	1:27:45 PM	BCl3 MFC set to  0.000000
10/15/2010	1:27:45 PM	PHl3 MFC set to  0.000000
10/15/2010	1:27:45 PM	SiCl4 MFC set to  0.000000
10/15/2010	1:27:45 PM	Bypass solenoid MFC set to  0.000000
10/15/2010	1:27:45 PM	Tube furnace set to 0
10/15/2010	1:27:46 PM	Run finished at 1:27 PM
10/15/2010	1:27:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
